CONFOCAL OPTICAL INSPECTION APPARATUS AND CONFOCAL OPTICAL INSPECTION METHOD

摘要

The confocal optical inspection apparatus that acquires a confocal image of an object and inspects the object includes a light source that emits illumination light; a first opening member that divides the illumination light emitted from the light source into illumination light beams, the first opening member having openings; an imaging device that acquires an image according to the respective illumination light beams reflected by the object; and an information processor that acquires a corrected confocal image in which distortion of an optical transmission path of the confocal optical inspection apparatus is removed from a time delayed integration (TDI) image obtained by a TDI operation of the imaging device, using a pre-measured point spread function (PSF) indicating optical characteristics of the confocal optical inspection apparatus.

主权项

1. A confocal optical inspection apparatus that acquires a confocal image of an object and inspects the object, the confocal optical inspection apparatus comprising:
a light source that is configured to emit illumination light; a first opening member that is configured to divide the illumination light emitted from the light source into a plurality of illumination light beams, the first opening member having a plurality of openings; an imaging device that is configured to acquire an image according to the respective illumination light beams reflected by the object; and an information processor that is configured to acquire a corrected confocal image in which distortion of an optical transmission path of the confocal optical inspection apparatus is removed from a time delayed integration (TDI) image obtained by a TDI operation of the imaging device, using a pre-measured point spread function (PSF) indicating optical characteristics of the confocal optical inspection apparatus.