GAS AND MOISTURE PERMEATION BARRIERS

摘要

A gas and moisture permeation barrier stack deposited by both sputtering and atomic layer deposition techniques. In one embodiment, the barrier stack comprises a bottom barrier layer deposited on a substrate by sputtering and a top barrier layer deposited on the sputtered layer by atomic layer deposition. In one embodiment, the sputtered barrier layer has a water vapor transmission rate of about 10−5 gm/m2·day or lower, and the top barrier layer improves the water vapor transmission rate of the resulting two-layer barrier stack to about 10−6 gm/m2·day or lower.

主权项

1. A composite article comprising:
a substrate; and a barrier stack for protecting a surface of the substrate, the barrier stack comprising:
a first barrier layer on the surface of the substrate, the first barrier layer being a sputtered barrier layer, anda second barrier layer on a surface of the first barrier layer, the second barrier layer being an atomic layer-deposited barrier layer, the first barrier layer being between the substrate and the second barrier layer, wherein the first barrier layer, in the absence of the second barrier layer, has a water vapor transmission rate of about 10−5 gm/m2·day or lower, and wherein the barrier stack has a water vapor transmission rate of about 10−6 gm/m2·day or lower.