发明名称 OPTICAL MEASUREMENT METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide an optical measurement method in which an absorption distribution or scatter distribution in a sample can be accurately found.SOLUTION: An optical measurement method includes: (1) a data acquisition step of detecting reflected light from a sample and acquiring the relation between a reflection position in the sample and the quantity of reflected light in a plurality of time zones or wavelength bands; and (2) a data processing step of finding an absorption component and a scattering component included in the attenuation quantity of the quantity of reflected light based upon the quantity of incident light. In the data processing step, a value of a smoothing parameter is set according to a value of a signal quantity index of the quantity of reflected light, and the absorption component and scattering component are so found as to minimize a target function including the quantity of reflected light, the absorption component, the scattering component, and a spatial secondary differential of the absorption component and a spatial secondary differential of the scattering component multiplied by the set value of the smoothing parameter.</p>
申请公布号 JP2014102087(A) 申请公布日期 2014.06.05
申请号 JP20120252372 申请日期 2012.11.16
申请人 SUMITOMO ELECTRIC IND LTD 发明人 HIRANO MITSUHARU
分类号 G01N21/17 主分类号 G01N21/17
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