| 摘要 |
The present application relates to a roll, a film formation apparatus, or a film formation method. The present application provides a roll which can be used for an apparatus capable of transporting a substrate, for example, a flexible substrate such as a plastic film and a fibrous or metallic web or film and simultaneously forming a film on the surface of the substrate, a film formation apparatus comprising the roll, or a film formation method using the apparatus. |
