| 摘要 |
<p>PROBLEM TO BE SOLVED: To secure an expected breakdown voltage by reducing stress generation due to constraint of a sensor diaphragm, and preventing stress concentration on a diaphragm edge.SOLUTION: An annular groove 11-2d is formed in a peripheral edge 11-2c of a stopper member 11-2 so as to be extended in the thickness direction of the stopper member 11-2 which is continuous to a non-joint region S1b of the peripheral edge 11-2c, and a groove 11-3d is formed in a peripheral edge 11-3c of a stopper member 11-3 so as to be extended in the thickness direction of the stopper member 11-3 which is continuous to a non-joint region S2b of the peripheral edge 11-3c. Thus, a stress can be distributed to the inside of the annular grooves 11-2d and 11-3d, and a stress can be prevented from being concentrated on a diaphragm edge.</p> |
