AIR-BLOWN CLEANING SYSTEM FOR PHOTOMASKS AND METHOD THEREOF

摘要

An air-blown cleaning system for cleaning a photomask includes an image capturing module, an identification and control module, and an air knife device. The image capturing module captures an image of the photomask and divided the image into a plurality of sections for the identification and control module to identify particular sections with contaminants for subsequent cleaning and to store such data into a database. The air knife device includes at least one air knife module which receives data from the database and controls the air knife module to air blow the particular sections with contaminants. The instant disclosure also includes a method of air blow cleaning for cleaning a photomask.

主权项

1. An air-blown cleaning system for cleaning a photomask, comprising:
an image capturing module for capturing an image of the photomask and dividing the image into a plurality of sections; an identification and control module for identifying the sections with contaminants on the photomask and storing to a database; and an air knife device including at least one air knife module, receiving data from the database, and controlled the air knife module to air blow the sections with contaminants on the photomask according to the database.