发明名称 METHOD AND APPARATUS CAPABLE OF SYNTHESIZING HIGH-DENSITY WIRES IN PORES AND ON SURFACE OF POROUS MATERIAL
摘要 According to an embodiment of the present invention, provided is a method of synthesizing nanowires that includes the following steps of: disposing a covering inside a reaction furnace such that the covering is spaced apart by a predetermined gap from a substrate which is provided for synthesis of nanowires; heating the reaction furnace; and synthesizing nanowires by allowing a source gas to be deposited on the substrate while flowing through the gap between the substrate and the covering.
申请公布号 US2014154417(A1) 申请公布日期 2014.06.05
申请号 US201314077482 申请日期 2013.11.12
申请人 Industry-Academic Cooperation Foundation, Yonsei University 发明人 Choi Doo Jin;Choi YooYoul
分类号 C23C16/44 主分类号 C23C16/44
代理机构 代理人
主权项 1. A method of synthesizing nanowires comprising following steps of: disposing a covering inside a reaction furnace such that the covering is spaced apart by a predetermined gap from a substrate which is provided for synthesis of nanowires; heating the reaction furnace, and synthesizing nanowires by allowing a source gas to be deposited on the substrate while flowing through the gap between the substrate and the covering.
地址 Seoul KR