| 摘要 |
PROBLEM TO BE SOLVED: To provide a dark field optical system with decreased flare. SOLUTION: A dark field optical system 100 includes a dark field cube 10 for reflecting illumination light toward a specimen, a parabolic mirror 5 for guiding the illumination light to the specimen, an objective lens 9 disposed between the specimen and the dark field cube 10 and for collecting observation light from the specimen, a stop 7 (a stray light stop) for blocking stray light, and an imaging lens 6 for focusing the observation light from the specimen incident through the dark field cube 10 and the stop 7, and thereby reduces flare. COPYRIGHT: (C)2012,JPO&INPIT |
