发明名称 APPARATUS FOR MANUFACTURING SILICON SUBSTRATE AND MANUFACTRING METHOD OF SILICON SUBSTRATE
摘要 An embodiment of the present invention provides an apparatus for manufacturing silicone substrates, which comprises: a silicone material injection unit to which a silicone material is supplied; a silicone melting unit to form molten silicone by melting the supplied silicone; a molten silicone storage unit which stores the supplied molten silicone, and has an outlet which discharges the molten silicone as a molten object at a constant thickness provided thereon; a transfer substrate which is arranged on the lower part of the molten silicone storage unit and which transfers the molten object; a surface heating unit which is provided on a position neighboring the outlet which heats a surface of the molten silicone discharged through the outlet; and a gas spraying unit for spraying high pressure gas onto the surface of the molten silicone.
申请公布号 KR101401351(B1) 申请公布日期 2014.06.03
申请号 KR20120114331 申请日期 2012.10.15
申请人 发明人
分类号 B22D11/00;C01B33/02;C30B28/10;H01L31/042 主分类号 B22D11/00
代理机构 代理人
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