Coated article and method for making said article

摘要

A coated article includes a substrate, and a plurality of aluminum nitride layers and a plurality of titanium boride layers formed on the substrate. Each aluminum nitride layer interleaves with one titanium boride layer. One of the aluminum nitride layers is directly formed on the substrate. A method for making the coated article is also described.

主权项

1. A method for making a coated article, comprising:
providing a substrate; forming an aluminum nitride layer on the substrate, magnetron sputtering the aluminum nitride layer using argon gas as the sputtering gas and the argon gas having a flow rate of about 300 sccm to about 450 sccm; using nitrogen as the reaction gas and nitrogen having a flow rate of about 120 sccm to about 200 sccm; magnetron sputtering the aluminum nitride layer being carried out at a temperature of about 150° C. to about 200° C.; using aluminum targets and the aluminum targets being supplied with a power of about 8 kw to about 10 kw; a negative bias voltage of about −150 V to about −500 V being applied to the substrate; forming a titanium boride layer on the aluminum nitride layer; and repeating the steps of alternatingly forming the aluminum nitride layer and the titanium boride layer to form the coated article, and the outermost layer of the coated article being one of the titanium boride layers.