Manufacturing method for microvalves

摘要

Microvalves are composed in a stacked design of a plurality of components comprising at least two housing parts, a membrane clamped between the two housing parts, and an actuator. A plurality of identical components are respectively arranged on a common, individual support plate and positioned next to each other in one plane. The manufacturing method for the microvalves comprises the steps of: providing the support plates with respectively identical components positioned in a grid pattern each having with the same grid dimension, inserting the support plates on top of one another in a retaining device, connecting at least some of the stacked components arranged on the support plates on an outer edge delimiting the components by a joining method, separating the microvalves by punching, and punching the membrane from a membrane support plate during connection of the components.

主权项

1. A method for manufacturing of microvalves, each microvalve being composed in a stacked design of a plurality of components comprising at least two housing parts, a membrane clamped between the two housing parts, and an actuator,
a plurality of identical components being respectively arranged on a common, individual support plate and positioned next to each other in one plane, the manufacturing method comprising the steps of:
a) providing support plates with respectively identical components positioned in a grid pattern with each having the same grid dimension,b) inserting the support plates on top of one another in a retaining device,c) connecting at least some of the stacked components arranged on the support plates on an outer edge delimiting the components by a joining method forming the microvalves,d) separating the microvalves by punching, ande) punching the membrane from a membrane support plate during connection of the components.