| 发明名称 |
Method of controlling amount of adsorbed carbon nanotubes and method of fabricating carbon nanotube device |
| 摘要 |
Provided are a method of controlling an amount of adsorbed carbon nanotubes (CNTs) and a method of fabricating a CNT device. The method of controlling an amount of adsorbed CNTs includes adsorbing CNT particles onto a semiconductor structure, and removing some of the adsorbed CNTs by performing an oxygen plasma treatment on the adsorbed CNT particles. |
| 申请公布号 |
US8741745(B2) |
申请公布日期 |
2014.06.03 |
| 申请号 |
US201113307438 |
申请日期 |
2011.11.30 |
| 申请人 |
Korea Institute of Science and Technology |
发明人 |
Jhon Young Min;Byun Young Tae;Jang Chi Woong;Kim Kyeong Heon;Lee Seok;Woo Deok Ha;Kim Sun Ho |
| 分类号 |
H01L21/20;B82Y40/00 |
主分类号 |
H01L21/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of controlling an amount of adsorbed carbon nanotube (CNTs), comprising:
adsorbing CNT particles onto a semiconductor structure by immersing a substrate in a solution of dichlorobenzene in which CNTs are dispersed; and removing some of the adsorbed CNT particles by performing an oxygen plasma treatment on the adsorbed CNT particles, wherein a photoresist (PR) pattern is formed on the substrate that is immersed in the solution of dichlorobenzene, and the substrate is immersed in the solution of dichlorobenzene for a predetermined time.
|
| 地址 |
Seoul KR |
