发明名称 APPARATUS FOR CLEANING CASSETTE
摘要 An embodiment of the present invention provides a cassette cleaning device. The cassette cleaning device comprises a loading chamber in which cassettes are arranged; an arm for transferring the cassettes in the loading chamber to a treatment tank mentioned below; at least one treatment tank in which the cassettes are loaded from the loading chamber and treated; and an unloading chamber to which the cassettes are transferred from the treatment tank. Also, the present invention comprises a support unit arranged above the cassettes inside at least one treatment tank to prevent the upward movement of the cassettes.
申请公布号 KR101402844(B1) 申请公布日期 2014.06.03
申请号 KR20130025756 申请日期 2013.03.11
申请人 LG SILTRON INCORPORATED 发明人 KIM, BYOUNG SOO
分类号 H01L21/67;B08B9/08;H01L21/304 主分类号 H01L21/67
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