| 摘要 |
The present invention relates to a polishing wheel for an electrostatic chuck for a display and a base member on which an electrostatic chuck is mounted and more specifically, to a polishing wheel for an electrostatic chuck for a display to polish an electrostatic chuck for display to make the electrostatic chuck have flatness lower than a predetermined level and a base member on which an electrostatic chuck is mounted. To achieve this, the polishing wheel for an electrostatic chuck for a display according to the present invention includes a wheel body including a disk having a predetermined thickness and an extension which vertically extends from the edge of the disk at a predetermined length; and a metallic layer at the tip end of the extension of the wheel body, having a predetermined thickness. Single-layered diamond power particles are formed at the tip end of the metallic layer. |
