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发明名称
元件之检查装置、元件之检查系统及元件之检查方法
摘要
申请公布号
TWI439707
申请公布日期
2014.06.01
申请号
TW101113075
申请日期
2012.04.12
申请人
东京威力科创股份有限公司 日本
发明人
岩津春生;藤泽良德
分类号
G01R31/26;G01R31/28
主分类号
G01R31/26
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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