MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

The present invention relates to a method for manufacturing an array substrate for a liquid crystal display device which includes the steps of: a) forming a gate electrode on a substrate; b) forming a gate insulation layer on the substrate including the gate electrode; c) forming a metal oxide layer (active layer) on the gate insulation layer; and d) forming a molybdenum metal layer (source/drain electrode) on the metal oxide layer. The d) step includes the steps of forming the molybdenum metal layer on the metal oxide layer and etching the molybdenum metal layer with an etchant composition. The etchant composition includes A) H2O2, B) a pH control additive, and C) remaining water in the total weight of the composition.