<p>Throughput of manufacturing thin-film solar panels by inline technique is made substantially independent from the time extent of different surface treatment steps by accordingly subdividing treatment steps in sub-steps performed in inline subsequent treatment stations. Treatment duration in each of the subsequent treatment stations is equal (τ).</p>
申请公布号
SG10201400525U(A)
申请公布日期
2014.05.29
申请号
SG10201400525U
申请日期
2010.03.15
申请人
OC OERLIKON BALZERS AG
发明人
VOSER, STEPHAN;RATTUNDE, OLIVER;DUBS, MARTIN;FEISTRITZER, GERALD;WUESTENHAGEN, VOLKER;DOVIDS, GERHARD