发明名称 |
B<sb>2</sb>F<sb>4</sb> MANUFACTURING PROCESS |
摘要 |
<p>A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates. In another specific aspect, a reactor system and methods are provided for manufacture of boron precursors such as B2F4.</p> |
申请公布号 |
SG11201401337Q(A) |
申请公布日期 |
2014.05.29 |
申请号 |
SG11201401337Q |
申请日期 |
2012.10.09 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
BYL, OLEG;JONES, EDWARD E.;PYDI, CHIRANJEEVI;SWEENEY, JOSEPH D. |
分类号 |
C01B35/06;B01J7/00;B01J19/24 |
主分类号 |
C01B35/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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