发明名称 INKJET PRINTABLE ETCHING RESIST
摘要 PROBLEM TO BE SOLVED: To provide an inkjet printable etching resist having excellent adhesive force for forming a current track on a semiconductor, preventing irregular width of a current track due to undercutting, and giving a uniform electric current.SOLUTION: A method is provided, which includes: selectively depositing a resist containing as a mixture, one or more solid hydrogenated rosin resins, one or more liquid hydrogenated rosin resin esters, and one or more fatty acids, on a semiconductor; then etching an uncoated portion of the semiconductor and simultaneously inhibiting undercutting of the resist; and then metallizing an etched portion to form a current track. The hydrogenated rosin resin and the hydrogenated rosin resin ester are resins derived from abietic acid or pimaric acid.
申请公布号 JP2014099590(A) 申请公布日期 2014.05.29
申请号 JP20130168766 申请日期 2013.08.15
申请人 ROHM & HAAS ELECTRONIC MATERIALS LLC 发明人 DON HOU;ROBERT K BAR
分类号 H01L21/306;H01L21/28 主分类号 H01L21/306
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