| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus of an organic material capable of performing vapor deposition in a stable composition without deteriorating purity of the organic material or the like, and further without decomposing the organic material.SOLUTION: A vapor deposition apparatus of an organic material is used for vapor-depositing the organic material on a film deposition object material in a vacuum atmosphere. The vapor deposition apparatus has an evaporation chamber in which the organic material is arranged, and which is used for heating and evaporating the organic material, and a guide part for guiding vapor of the organic material generated in the evaporation chamber to the film deposition object material. The evaporation chamber is always kept at a lower temperature than the guide part. |
