发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING SAME
摘要 A semiconductor device and method of fabricating the semiconductor device are disclosed. The method includes forming a plurality of gate electrodes at a predetermined interval on a surface of a semiconductor substrate, forming spacers on sidewalls of the gate electrodes, depositing an interconnection layer conformally on the surface of the semiconductor substrate over the gate electrodes and the spacers, selectively etching the interconnection layer, wherein at least a portion of the interconnection layer that is formed on the surface of the semiconductor substrate and sidewalls of the spacers and located between adjacent gate electrodes remains after the selective etch, and forming an electrical contact on the etched interconnection layer located between the adjacent gate electrodes.
申请公布号 US2014145267(A1) 申请公布日期 2014.05.29
申请号 US201313947911 申请日期 2013.07.22
申请人 SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION (SHANGHAI) 发明人 CAO GUOHAO;YANG GUANGLI;ZHOU YANG;WANG GANGNING
分类号 H01L29/66;H01L29/78 主分类号 H01L29/66
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