| 摘要 |
<p>Disclosed is a setting method of a cleaning apparatus for generating harmonic waves. The setting method of the cleaning apparatus for generating harmonic waves according to the present invention, in the setting method of the cleaning apparatus comprising a vibration element used for an ultrasonic cleaning process, comprises: a measuring step of checking the relation between the impedance and the frequency of the vibration element, and the n^th minimum value of the impedance; a natural frequency detecting step of detecting the capacitance and the natural frequency of the vibration element; an inductance detecting step of detecting inductance for the n^th minimum value according to the capacitance and the natural frequency of the vibration element; and a setting step of applying the natural frequency to the vibration element, and setting the inductance in which n is not 1. The present invention shows all the frequency characteristics of a fundamental frequency and high frequencies higher than the fundamental frequency, thereby achieving uniform cleaning by implementing strong cleaning in the fundamental frequency and precise cleaning in the high frequencies. [Reference numerals] (AA) Start;(BB) End;(S100) Measuring step;(S200) Natural frequency detecting step;(S300) Inductance detecting step;(S400) Setting step;(S500) Obtaining step</p> |
