发明名称 |
Coating of shield surfaces in deposition systems |
摘要 |
A deposition chamber shield having a stainless steel coating of from about 100 microns to about 250 microns thick wherein the coated shield has a surface roughness of between about 300 microinches and about 800 microinches and a surface particle density of less than about 0.1 particles/mm2 of particles between about 1 micron and about 5 microns in size and no particles below about 1 micron in size, and process for production thereof is disclosed. |
申请公布号 |
US8734907(B2) |
申请公布日期 |
2014.05.27 |
申请号 |
US201213365070 |
申请日期 |
2012.02.02 |
申请人 |
JINDAL VIBHU;KAGEYAMA JUNICHI;SEMATECH, INC.;ASAHI GLASS CO., LTD. |
发明人 |
JINDAL VIBHU;KAGEYAMA JUNICHI |
分类号 |
B05D3/10 |
主分类号 |
B05D3/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|