发明名称 |
Method for manufacturing piezoelectric actuator |
摘要 |
A method for manufacturing a piezoelectric actuator is disclosed that includes forming a vibration plate, forming a plurality of electrodes on the vibration plate, forming a piezoelectric layer on the electrodes, and forming a common electrode on the piezoelectric layer. |
申请公布号 |
US8732921(B2) |
申请公布日期 |
2014.05.27 |
申请号 |
US20080343788 |
申请日期 |
2008.12.24 |
申请人 |
SUGAHARA HIROTO;KOBAYASHI KAZUO;BROTHER KOGYO KABUSHIKI KAISHA |
发明人 |
SUGAHARA HIROTO;KOBAYASHI KAZUO |
分类号 |
H01L41/22;B41J2/14;B41J2/16;H01L41/047;H01L41/09;H01L41/314 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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