Method and device for measuring surfaces in a highly precise manner

摘要

A device and a method for measuring at least one surface section of an object that is mounted on a carrier includes at least one reference object that can be fixed relative to the carrier, and a holder that can be moved relative to the reference object in at least one first direction and on which a reference body and a distance measuring device are arranged. The reference body and the distance measuring device are mounted in a rotatable manner relative to each other. The distance measuring device is designed to determine a first distance to a first point of the surface section of the object and a second distance to a second point of the reference body wherein the second point corresponds to the first point.