发明名称 LIQUID-APPLICATION DEVICE AND LIQUID-APPLICATION METHOD
摘要 <p>A liquid-application device 1 includes a substrate feed part R1 where a magazine 5 for feeding a substrate is installed in which the substrates 4 before a liquid Q is applied are accommodated, an application head 14 which applies the liquid Q to the substrate 4 taken out from the magazine 5 for feeding the substrate installed in the substrate feed part R1 and moved to a working position and a substrate collecting part R2 where a magazine 5 for collecting the substrate is installed in which the substrates 4 with the liquid Q applied by the application head 14 are accommodated. The substrate feed part R1 and the substrate collecting part R2 are arranged and located in parallel in the vertical direction.</p>
申请公布号 KR20140063505(A) 申请公布日期 2014.05.27
申请号 KR20137021508 申请日期 2012.03.13
申请人 PANASONIC CORPORATION 发明人 NONOMURA MASARU;ABE SEIKOU
分类号 B05C13/00;B05D3/00;H01L21/677 主分类号 B05C13/00
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