发明名称 |
LIQUID-APPLICATION DEVICE AND LIQUID-APPLICATION METHOD |
摘要 |
<p>A liquid-application device 1 includes a substrate feed part R1 where a magazine 5 for feeding a substrate is installed in which the substrates 4 before a liquid Q is applied are accommodated, an application head 14 which applies the liquid Q to the substrate 4 taken out from the magazine 5 for feeding the substrate installed in the substrate feed part R1 and moved to a working position and a substrate collecting part R2 where a magazine 5 for collecting the substrate is installed in which the substrates 4 with the liquid Q applied by the application head 14 are accommodated. The substrate feed part R1 and the substrate collecting part R2 are arranged and located in parallel in the vertical direction.</p> |
申请公布号 |
KR20140063505(A) |
申请公布日期 |
2014.05.27 |
申请号 |
KR20137021508 |
申请日期 |
2012.03.13 |
申请人 |
PANASONIC CORPORATION |
发明人 |
NONOMURA MASARU;ABE SEIKOU |
分类号 |
B05C13/00;B05D3/00;H01L21/677 |
主分类号 |
B05C13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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