发明名称 DEVICE FOR CONTROLLING THE HORIZONTALITY
摘要 <p>The present invention relates to a device for maintaining horizontality capable of maintaining horizontality by fixing one among the four edges of a rectangle as a reference point and using a simple algorithm. According to the present invention, the device for maintaining horizontality includes: a substrate mounting board which has a rectangular board shape and onto the top of which a substrate is mounted; a reference point which is placed at the lower part of one edge of the substrate mount board while the height is fixed and acts as a reference for horizontal change of the substrate mounting board; an edge elevation unit which is installed in each of the other three edges except for the edge acting as a reference and elevates each edge of the substrate mounting board independently in the up-down direction; a height measuring unit which is installed at the top of each edge of the substrate mounting board and measures the height of each edge of a substrate mounted onto the substrate mounting board; and a horizontality control unit which controls the edge elevation unit according to the height of each edge of the substrate measured by the height measuring unit in order to make the four edges of the substrate have the same height.</p>
申请公布号 KR20140062963(A) 申请公布日期 2014.05.27
申请号 KR20120129320 申请日期 2012.11.15
申请人 AN, SEONG RYONG 发明人 AN, SEONG RYONG
分类号 G06F3/041;H01L21/68 主分类号 G06F3/041
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