发明名称 Methods and devices for forming nanostructure monolayers and devices including such monolayers
摘要 Methods for forming or patterning nanostructure arrays are provided. The methods involve formation of arrays on coatings comprising nanostructure association groups, formation of arrays in spin-on-dielectrics, solvent annealing after nanostructure deposition, patterning using resist, and/or use of devices that facilitate array formation. Related devices for forming nanostructure arrays are also provided, as are devices including nanostructure arrays (e.g., memory devices).
申请公布号 US8735226(B2) 申请公布日期 2014.05.27
申请号 US201313956483 申请日期 2013.08.01
申请人 SANDISK 3D LLC;SANDISK CORPORATION 发明人 CHEN JIAN;CRUDEN KAREN CHU;DUAN XIANGFENG;LIU CHAO;PARCE J. WALLACE
分类号 H01L21/31;H01L21/28;H01L21/3105;H01L21/82;H01L27/10;H01L29/739 主分类号 H01L21/31
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