发明名称 |
Showerhead for processing chamber |
摘要 |
A top assembly for a processing chamber having a back plate and a hub is provided. The back plate has a first portion and a second portion. The first portion is connected to the second portion through a central region of the back plate, wherein a gap is defined between opposing surfaces of the first and second portions outside the central region. The first portion includes an embedded heating element. The hub is affixed to a top surface of the second portion of the back plate over the central region. The hub has a top surface with a plurality of channel openings defined within a central region of the hub and a bottom surface having a central extension with a plurality of channels defined therethrough. The bottom surface includes an annular extension spaced apart from the central extension. |
申请公布号 |
US8733280(B2) |
申请公布日期 |
2014.05.27 |
申请号 |
US20100973845 |
申请日期 |
2010.12.20 |
申请人 |
YAP LIPYEOW;DEDONTNEY JAY;SHAO SHOUQIAN;WRIGHT JASON;INTERMOLECULAR, INC. |
发明人 |
YAP LIPYEOW;DEDONTNEY JAY;SHAO SHOUQIAN;WRIGHT JASON |
分类号 |
C23C16/455;C23C16/505;H01L21/3065 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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