发明名称 |
Self Calibration for mirror positioning in Optical MEMS Interferometers |
摘要 |
A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit. |
申请公布号 |
US2014139839(A1) |
申请公布日期 |
2014.05.22 |
申请号 |
US201414165997 |
申请日期 |
2014.01.28 |
申请人 |
SI-WARE SYSTEMS |
发明人 |
MEDHAT MOSTAFA;MORTADA BASSEM;EL SHATER AHMED OTHMAN;NAGY MUHAMMED;GAD SEIF MINA;SAADANY BASSAM A.;HAFEZ AMR N. |
分类号 |
G01B9/02;G02B26/08 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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