| 摘要 |
The invention relates to a force measuring device comprising a crystalline layer with piezoelectric properties, said layer being arranged on at least part of a surface of a solid state actuator (or carrier), and comprising at least one wear-protection layer with anti-frictional properties. The piezoelectric layer consists of crystalline aluminium nitride having a hexagonal crystal structure with a pronounced crystal orientation (002), at least one electrically conductive layer being applied between the surface of the solid-state actuator and the crystalline aluminium nitride layer, said conductive layer being preferably a metal layer consisting of at least one metal, which when oxidized, forms an electrically insulating oxide that is mechanically and thermally more stable than molybdenum(VI) oxide (MoO3). |
