| 摘要 |
PROBLEM TO BE SOLVED: To provide a relatively miniaturized compensation optical device.SOLUTION: A compensation optical device comprises: a wavefront correction part for correcting a wavefront aberration; a first scanning part for scanning an object to be examined with light in a first direction; a second scanning part for scanning the object to be examined with light in a second direction that crosses the first direction; and an optical element disposed on a light path between the wavefront correction part and the first scanning part, and on a light path between the first scanning part and the second scanning part. |
