| 摘要 |
PROBLEM TO BE SOLVED: To provide a long-life highly reliable metal elastic member constituting a beam part which is a twist rotary shaft capable of oscillating a movable part within a frequency range of 500 Hz or less, a micro-machine device using the metal elastic member, and a method for manufacturing the micro-machine device.SOLUTION: A metal elastic member includes at least one movable part 3, a fixed part 2, and a pair of beam parts 4 for supporting the movable part 3 to the fixed part 2 from both sides, and is used for the beam part 4 of a micro-machine device 1 capable of oscillating the movable part around an axial center P using the beam part 4 as a twist rotary shaft. The metal elastic member includes a metal rod part 4a of a predetermined length, a fixed side pad 4b formed on one end side of the metal rod part 4a to be fixed to the fixed part 2, and a movable side pad 4c formed on the other end side of the metal rod part 4a to be fixed to the movable part 3. At least the metal rod part 4a is formed with a cross-sectional area of 1 mmor less by using a physical or chemical processing method excluding a mechanical processing method, and the movable part 3 is oscillated with the frequency range of 150 Hz to 500 Hz. |
