CONDUCTIVE OXIDE, OXIDE SEMICONDUCTOR FILM AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a conductive oxide which is inexpensive and stably supplied and capable of forming an oxide semiconductor film having high carrier mobility, and to provide an oxide semiconductor film and a semiconductor device including an oxide semiconductor film.SOLUTION: The conductive oxide contains crystalline InAlZnO(m is 1 or more natural number) and crystalline ZnAlO. The oxide semiconductor film is formed by a sputtering method using such a conductive oxide as a target. The semiconductor device includes such an oxide semiconductor film.