| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring a pattern capable of easily and accurately measuring a distance between patterns of a measurement object.SOLUTION: A device 1 for measuring a pattern photographs patterns A, B of a retardation film 20 disposed on a measurement table 40 by cameras 31, 32 together with reference patterns 11, 12, respectively. An information processing device 60 calculates a positional deviation D1 between the reference pattern 11 and the pattern A and a positional deviation D2 between the reference pattern 12 and the pattern B by using an actual distance per unit pixel, from an image 131 photographed by the camera 31 and an image 132 photographed by the camera 32, and calculates a distance Lp between the patterns A and B from the positional deviations D1, D2 and from a known distance L between the reference patterns 11, 12. |
