| 发明名称 |
PLASMA GENERATING APPARATUS, AND CLEANING/PURIFYING APPARATUS USING SAME |
| 摘要 |
A cleaning and purifying apparatus 40 detects an abnormal event that occurs during use of the plasma generator 1 and controls plasma discharge based on the result of detection. |
| 申请公布号 |
EP2733121(A1) |
申请公布日期 |
2014.05.21 |
| 申请号 |
EP20120815572 |
申请日期 |
2012.06.06 |
| 申请人 |
PANASONIC CORPORATION |
发明人 |
NARITA, KENJI;SANEMATSU, WATARU |
| 分类号 |
C02F1/48;A45D27/46;A61L2/18;B01J19/08;B08B3/08;B26B19/48;C02F1/50;C02F1/72;C02F1/78;H05H1/24 |
主分类号 |
C02F1/48 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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