化学机械平坦化一含铜基材的方法,申请号TW099144847-传众专利搜索

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发明名称	化学机械平坦化一含铜基材的方法
摘要
申请公布号	TWI438267	申请公布日期	2014.05.21
申请号	TW099144847	申请日期	2010.12.20
申请人	气体产品及化学品股份公司美国	发明人	史晓波
分类号	C09K3/14;H01L21/304	主分类号	C09K3/14
代理机构		代理人	陈展俊台北市大安区和平东路2段203号4楼之2;林圣富台北市大安区和平东路2段203号4楼之2
主权项
地址	美国

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