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发明名称
处理装置
摘要
申请公布号
TWI438290
申请公布日期
2014.05.21
申请号
TW098109526
申请日期
2009.03.24
申请人
爱发科股份有限公司 日本
发明人
池田均;菊池正志;小川正浩;冈山智彦
分类号
C23C14/22;G02F1/133;F27D7/06
主分类号
C23C14/22
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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