| 摘要 |
PROBLEM TO BE SOLVED: To provide inexpensively a profiling mechanism which realizes profiling of high accuracy by a small profiling force. SOLUTION: This profiling mechanism includes a hollow suction-exhaust part 3 which projects downward from the center of the underside of a slider mechanism 2 equipped with a sliding holding part 22 and a sliding part 21 and being slidable two-dimensionally. A profiling object 7 sucked on the suction-exhaust part 3 is pushed onto a profiling reference 10 and the profiling object 7 is made to profile the profiling reference 10 by controlling a flow rate of sucked-exhausted air in the suction-exhaust part 3 so that a contact C1 of the profiling object 7 and the profiling reference 10 and a contact of the suction-exhaust part 3 and the profiling object 7 may not slide together. COPYRIGHT: (C)2011,JPO&INPIT |
