Translation mechanism for opto-mechanical inspection

摘要

An apparatus is disclosed for moving an optical component (10) of an opto-mechanical inspection system relative to an object to be inspected using a linear actuator comprising a coil (28d) located in a magnetic field created by a magnet assembly (28a). A translation stage (22) is coupled to either of said coil and magnet assembly whereby the translation stage is configured for motion relative to the other of said coil and magnet assembly. Movement of the translation stage is configured along a plane that is substantially perpendicular to a direction of incident light (12a,12b) projected from a light source through the optical component onto the object.