发明名称 |
USE OF AN OPTICAL FIBRE DEVICE FOR INTERFEROMETRIC ANALYSIS OF THE SURFACE CONDITION OF AN OBJECT |
摘要 |
The instant disclosure describes an optical device for the interferometric analysis of the surface condition of an object, including: a light source; an optical fibre capable of receiving the incident light wave and transmitting said wave to the object; a detector capable of detecting a combination between a light wave reflected by the optical fibre and a light wave returned by the object; and in which the optical fibre has a free end in the shape of a cone, with a vertex angle of between 15 and 25 degrees, the tip of the cone having dimensions of less than 50×50 nm, and the tip of the cone being placed, while in use, at a distance of between 5 and 50μm from the surface of the object. |
申请公布号 |
EP2370779(B1) |
申请公布日期 |
2014.05.21 |
申请号 |
EP20090805803 |
申请日期 |
2009.12.29 |
申请人 |
UNIVERSITÉ JOSEPH FOURIER;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES |
发明人 |
CHEVRIER, JOËL;HUANT, SERGE;SCHWARTZ, WILFRID;SIRIA, ALESSANDRO |
分类号 |
G01B9/02;G01B7/34;G01B11/24;G01B21/00 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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