发明名称 USE OF AN OPTICAL FIBRE DEVICE FOR INTERFEROMETRIC ANALYSIS OF THE SURFACE CONDITION OF AN OBJECT
摘要 The instant disclosure describes an optical device for the interferometric analysis of the surface condition of an object, including: a light source; an optical fibre capable of receiving the incident light wave and transmitting said wave to the object; a detector capable of detecting a combination between a light wave reflected by the optical fibre and a light wave returned by the object; and in which the optical fibre has a free end in the shape of a cone, with a vertex angle of between 15 and 25 degrees, the tip of the cone having dimensions of less than 50×50 nm, and the tip of the cone being placed, while in use, at a distance of between 5 and 50μm from the surface of the object.
申请公布号 EP2370779(B1) 申请公布日期 2014.05.21
申请号 EP20090805803 申请日期 2009.12.29
申请人 UNIVERSITÉ JOSEPH FOURIER;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES 发明人 CHEVRIER, JOËL;HUANT, SERGE;SCHWARTZ, WILFRID;SIRIA, ALESSANDRO
分类号 G01B9/02;G01B7/34;G01B11/24;G01B21/00 主分类号 G01B9/02
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