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发明名称
用于化学机械硏磨之浆料传送装置
摘要
申请公布号
TWM478906
申请公布日期
2014.05.21
申请号
TW103200058
申请日期
2014.01.02
申请人
科建国际实业股份有限公司 新竹市东区光复路1段373之1号
发明人
刘元周
分类号
H01L21/304;B24B57/02
主分类号
H01L21/304
代理机构
代理人
吴宏亮 台中市南屯区永春东一路549号3楼;刘绪伦 台中市南屯区永春东一路549号3楼
主权项
地址
新竹市东区光复路1段373之1号
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