发明名称 Semiconductor device having a wafer level through silicon via (TSV)
摘要 A semiconductor device is disclosed allowing detection of a connection state of a Through Silicon Via (TSV) at a wafer level. The semiconductor device includes a first line formed over a Through Silicon Via (TSV), a second line formed over the first line, and a first power line and a second power line formed over the same layer as the second line. Therefore, the semiconductor device can screen not only a chip-to-chip connection state after packaging completion, but also a connection state between the TSV and the chip at a wafer level, so that unnecessary costs and time encountered in packaging of a defective chip are reduced.
申请公布号 US8729674(B2) 申请公布日期 2014.05.20
申请号 US201213681348 申请日期 2012.11.19
申请人 SK HYNIX INC. 发明人 WOO TAKE KYUN
分类号 H01L29/40;H01L23/053;H01L23/12 主分类号 H01L29/40
代理机构 代理人
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