发明名称 Semiconductor device having a plurality of fins with different heights and method for manufacturing the same
摘要 The present disclosure provides a semiconductor device and a method for manufacturing the same. The semiconductor device comprises: a semiconductor layer comprising a plurality of semiconductor sub-layers; and a plurality of fins formed in the semiconductor layer and adjoining the semiconductor layer, wherein at least two of the plurality of fins comprise different numbers of the semiconductor sub-layers and have different heights. According to the present disclosure, a plurality of semiconductor devices with different dimensions and different driving abilities can be integrated on a single wafer.
申请公布号 US8729611(B2) 申请公布日期 2014.05.20
申请号 US201113503693 申请日期 2011.11.18
申请人 ZHU HUILONG;YIN HAIZHOU;LUO ZHIJIONG;INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES 发明人 ZHU HUILONG;YIN HAIZHOU;LUO ZHIJIONG
分类号 H01L27/088 主分类号 H01L27/088
代理机构 代理人
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