发明名称 Method for growing group 13 nitride crystal and group 13 nitride crystal
摘要 To grow a gallium nitride crystal, a seed-crystal substrate is first immersed in a melt mixture containing gallium and sodium. Then, a gallium nitride crystal is grown on the seed-crystal substrate under heating the melt mixture in a pressurized atmosphere containing nitrogen gas and not containing oxygen. At this time, the gallium nitride crystal is grown on the seed-crystal substrate under a first stirring condition of stirring the melt mixture, the first stirring condition being set for providing a rough growth surface, and the gallium nitride crystal is subsequently grown on the seed-crystal substrate under a second stirring condition of stirring the melt mixture, the second stirring condition being set for providing a smooth growth surface.
申请公布号 US8729672(B2) 申请公布日期 2014.05.20
申请号 US201313861695 申请日期 2013.04.12
申请人 NGK INSULATORS, LTD. 发明人 SHIMODAIRA TAKANAO;HIRAO TAKAYUKI;IMAI KATSUHIRO
分类号 H01L29/20 主分类号 H01L29/20
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