发明名称 Enhancing uniformity of slab region thickness in optical components
摘要 A method of forming an optical device includes generating a device precursor having a layer of a light-transmitting medium on a base. The method also includes forming an etch stop on the layer of light-transmitting medium. An active medium is grown on the etch stop and on the light-transmitting medium such that the light-transmitting medium is between the base and the grown active medium. The grown active medium is etched down to the etch stop so as to define a ridge in the active medium. The ridge of active medium defines a portion of a component waveguide that will guide a light signal through an active component on the device.
申请公布号 US8728837(B2) 申请公布日期 2014.05.20
申请号 US201213506910 申请日期 2012.05.23
申请人 FONG JOAN;QIAN WEI;FENG DAZENG;ASGHARI MEHDI;KOTURA, INC. 发明人 FONG JOAN;QIAN WEI;FENG DAZENG;ASGHARI MEHDI
分类号 H01L21/00 主分类号 H01L21/00
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