发明名称 |
Enhancing uniformity of slab region thickness in optical components |
摘要 |
A method of forming an optical device includes generating a device precursor having a layer of a light-transmitting medium on a base. The method also includes forming an etch stop on the layer of light-transmitting medium. An active medium is grown on the etch stop and on the light-transmitting medium such that the light-transmitting medium is between the base and the grown active medium. The grown active medium is etched down to the etch stop so as to define a ridge in the active medium. The ridge of active medium defines a portion of a component waveguide that will guide a light signal through an active component on the device. |
申请公布号 |
US8728837(B2) |
申请公布日期 |
2014.05.20 |
申请号 |
US201213506910 |
申请日期 |
2012.05.23 |
申请人 |
FONG JOAN;QIAN WEI;FENG DAZENG;ASGHARI MEHDI;KOTURA, INC. |
发明人 |
FONG JOAN;QIAN WEI;FENG DAZENG;ASGHARI MEHDI |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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