| 摘要 |
PROBLEM TO BE SOLVED: To prevent separation and fall of an upper lid thermal insulation material in a case where a body thermal insulation material surrounding the side peripheral surface of a reaction pipe over the circumferential direction thereof and the upper lid thermal insulation material closing the upper opening of the body insulation material are provided as a thermal insulation material outside the vertical reaction pipe used for thermally processing a substrate.SOLUTION: In the contact part where the underside peripheral edge part of an upper lid thermal insulation material 22 is in contact with a body thermal insulation material 21, a protective layer 23 higher in density (hardness) than the body thermal insulation material 21 is arranged. This protective layer 23 is joined (sintered) integrally with the upper lid thermal insulation material 22 so that when the upper lid thermal insulation material 22 thermally expands or contracts as the temperature of a reaction pipe 2 increases or decreases, the protective layer 23 deforms following the thermal expansion or contraction. Additionally, the protective layer 23 is formed from ceramics fiber in order to thermally insulate the reaction pipe 2, and the thickness of the protective layer 23 is set to 1 mm to 2 mm. |
