PROCEDE DE CORRECTION DES EFFETS DE PROXIMITE ELECTRONIQUE UTILISANT DES FONCTIONS DE DIFFUSION DECENTREES

摘要

The method involves correcting effects of forward and backward scattering of an electronic beam (100) by calculating a point spread function i.e. linear combination of Gaussian and gamma functions, where the point spread function comprises a function i.e. gamma distribution function, whose one maximum value is not located on a center part of the electronic beam and another maximum value is located on a backward scattering peak of the electronic beam, and another function with a maximum value located on the center part of the electronic beam to model forward scattering. Independent claims are also included for the following: (1) a non-ephemeral computer-readable medium comprising a set of instructions to simulate or correct effects of forward and backward scattering of an electron beam (2) an electronic lithography system (3) a system for simulating electronic lithography (4) an electronic microscopy system.