发明名称 |
CATALYST ADSORPTION METHOD AND ADSORPTION DEVICE |
摘要 |
A catalyst adsorption method can sufficiently adsorb a catalyst to a lower portion of a recess formed in a substrate. A substrate 20 in which a recess 22 is formed is prepared. Then, a catalyst 23 formed of nanoparticles coated with a dispersant is adsorbed to a surface of the substrate 20 by bringing the substrate 20 into contact with a catalyst solution 12 containing the catalyst by a catalyst adsorption device 10. At that time, a high frequency vibration is applied to the catalyst solution 12. |
申请公布号 |
KR20140059796(A) |
申请公布日期 |
2014.05.16 |
申请号 |
KR20147006158 |
申请日期 |
2012.08.08 |
申请人 |
TOKYO ELECTRON LIMITED;A SCHOOL CORPORATION KANSAI UNIVERSITY |
发明人 |
SHINGUHARA SHOSO;INOUE FUMIHIRO;MIYAKE HIROSHI;ARIMA RYOHEI;IWASHITA MITSUAKI;TANAKA TAKASHI |
分类号 |
C23C18/18;B01J19/10;B01J23/44;H01L21/288;H01L21/3205;H01L21/768 |
主分类号 |
C23C18/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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