发明名称 CATALYST ADSORPTION METHOD AND ADSORPTION DEVICE
摘要 A catalyst adsorption method can sufficiently adsorb a catalyst to a lower portion of a recess formed in a substrate. A substrate 20 in which a recess 22 is formed is prepared. Then, a catalyst 23 formed of nanoparticles coated with a dispersant is adsorbed to a surface of the substrate 20 by bringing the substrate 20 into contact with a catalyst solution 12 containing the catalyst by a catalyst adsorption device 10. At that time, a high frequency vibration is applied to the catalyst solution 12.
申请公布号 KR20140059796(A) 申请公布日期 2014.05.16
申请号 KR20147006158 申请日期 2012.08.08
申请人 TOKYO ELECTRON LIMITED;A SCHOOL CORPORATION KANSAI UNIVERSITY 发明人 SHINGUHARA SHOSO;INOUE FUMIHIRO;MIYAKE HIROSHI;ARIMA RYOHEI;IWASHITA MITSUAKI;TANAKA TAKASHI
分类号 C23C18/18;B01J19/10;B01J23/44;H01L21/288;H01L21/3205;H01L21/768 主分类号 C23C18/18
代理机构 代理人
主权项
地址