发明名称 |
METHOD FOR FABRICATING SOLAR CELL USING MOMBE AND SOLAR CELL THEREOF |
摘要 |
<p>One embodiment of the present invention provides a manufacturing method of a solar cell capable of forming a transparent electrode on the front surface of a nano-wire by forming a transparent electrode on a micro- or nano-wire of a semiconductor substrate using a metal-organic molecular beam epitaxy (MOMBE) deposition method and a solar cell manufactured by the same. To that end, the manufacturing method of a solar cell includes: a step of preparing a first conductivity-type semiconductor substrate including a first surface and a second surface; a step of patterning photo-resist on the second surface of the first conductivity-type semiconductor substrate; a wire formation step of forming a metal thin film layer on the second surface; a step of forming a micro-wire on the area corresponding to the photo-resist and forming a nano-wire on the area not corresponding to the photo-resist; a step of forming a second conductivity-type impurity doping area by doping second conductivity-type impurities on the micro-wire and on the nano-wire; a step of forming a first electrode on the first surface of the semiconductor substrate; and a step of forming a second electrode on the surface of the second conductivity-type impurity doping area. In the step of forming the second electrode, a transparent electrode is formed using the MOMBE method, and the first electrode is doped with a first metal material.</p> |
申请公布号 |
KR20140059318(A) |
申请公布日期 |
2014.05.16 |
申请号 |
KR20120124610 |
申请日期 |
2012.11.06 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
JEONG, CHAE HWAN;PARK, SUNG JAE;KIM, HWA JUNG |
分类号 |
H01L31/042;H01L31/0224;H01L31/18 |
主分类号 |
H01L31/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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